Mask set having feature patterns and dummy patterns

ABSTRACT

A mask set includes a first mask, a second mask, and a third mask respectively include a first layout pattern, a second layout pattern, and a third layout pattern. The first layout pattern includes mandrel patterns and dummy mandrel patterns. The second layout pattern includes geometric patterns covering portions of the mandrel patterns and portions of the dummy mandrel patterns. The third layout pattern includes dummy pad patterns which are laterally spaced apart from the mandrel patterns and the dummy mandrel patterns.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a division of U.S. application Ser. No. 14/023,472,filed Sep. 11, 2013, the disclosure of which is hereby incorporatedherein by reference in its entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention generally relates to the field of layout patternsof semiconductor devices, and more particularly to a mask set havingfeature patterns and dummy patterns, which is configured to fabricate alayout pattern in non-planar semiconductor devices.

2. Description of the Prior Art

Integrated circuits (IC) are made of devices and interconnections, whichare formed through patterned features in different layers. During thefabrication process of ICs, the photolithography is an essentialtechnique. The photolithography is used to form designed patterns, suchas implantation patterns or layout patterns, on at least a photomask,and then to precisely transfer such patterns to a photoresist layerthrough exposure and development steps. Finally, by performing severalsemiconductor processes such as etching processes, ion implantations,depositions and so forth, complicated and sophisticated IC structurescan be obtained.

With the continuous miniaturization of semiconductor devices and theremarkable advance in fabrication techniques of semiconductor devices,the conventional lithography process meets its limitation due toprintability and manufacturability problems. To meet the requirements ofdevice design rules which continue to push the resolution limits ofexisting processes and tooling, a double patterning technique (DPT) hasbeen developed and taken as one of the most promising lithographytechnologies for 32 nanometer (nm) node and 22 nm node patterning, sinceit can increase the half-pitch resolution up to twice higher by usingcurrent infrastructures. Besides, three-dimensional or non-planartransistor technology, such as the fin field effect transistor (FinFET)technology, has also been developed to replace planar MOS transistors.Generally, patterned structures in a FinFET, such as fin structures, canbe obtained by sidewall image transfer (SIT).

Although the above-mentioned technologies, i.e. DPT and 3-D transistortechnology, have been widely adopted by semiconductor manufacturers andsuccessively overcome major drawbacks in the fabricating process, thereare still some problems needed to be solved. For example, in order toprevent or overcome optical problems, such as optical proximity effect,in photolithography processes and polishing problems, such as dishingphenomenon, in planarization processes, dummy patterns are often addedto layout patterns of semiconductor devices through proper computersimulation at the beginning of the fabrication process. However, how toeffectively distribute different dummy patterns over individualphotomasks is still a major topic for study in the semiconductor field.

SUMMARY OF THE INVENTION

In accordance with the present invention, the disadvantage and problemsassociated with a mask set configured to fabricate a layout pattern innon-planar semiconductor devices have been substantially reduced oreliminated. In particular, a mask set having feature patterns and dummypatterns is provided during the process of fabricating non-planarsemiconductor devices.

In accordance with one embodiment of the present invention, a mask setfor defining a layout pattern is provided. The mask set includes a firstmask, a second mask, and a third mask respectively include a firstlayout pattern, a second layout pattern, and a third layout pattern. Thefirst layout pattern includes mandrel patterns and dummy mandrelpatterns. The second layout pattern includes geometric patterns coveringportions of the mandrel patterns and portions of the dummy mandrelpatterns. The third layout pattern includes dummy pad patterns which arelaterally spaced apart from the mandrel patterns and the dummy mandrelpatterns.

These and other objectives of the present invention will no doubt becomeobvious to those of ordinary skill in the art after reading thefollowing detailed description of the preferred embodiment that isillustrated in the various figures and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention and itsadvantages, references is now made to the following description, takenin conjunction with the accompanying drawings, in which:

FIG. 1 illustrates an exemplary layout pattern in accordance with oneembodiment of the present invention;

FIG. 2 illustrates an exemplary first mask with a first layout patternin accordance with one embodiment of the present invention;

FIG. 3 illustrates a semiconductor structure including at least a firstlayout pattern surrounded by spacers in accordance with one embodimentof the present invention;

FIG. 4 is a schematic cross-sectional diagram taken along a line A-A′ inFIG. 4;

FIG. 5 illustrates an exemplary second mask with a second layout patternin accordance with one embodiment of the present invention;

FIG. 6 illustrates a semiconductor structure after the step oftransferring a second layout pattern to a layer over a substrate inaccordance with one embodiment of the present invention;

FIG. 7 illustrates an exemplary third mask with a third layout patternin accordance with one embodiment of the present invention;

FIG. 8 illustrates a layout pattern fabricated on a substrate after thestep of transferring a third layout pattern in accordance with oneembodiment of the present invention;

FIG. 9 is a schematic cross-sectional diagram taken along a line B-B′ inFIG. 8;

FIG. 10 illustrates a layout pattern fabricated on a substrate after anetching process in accordance with one embodiment of the presentinvention;

FIG. 11 is a flowchart detailing an exemplary method for forming alayout pattern on a substrate in accordance with one embodiment of thepresent invention.

DETAILED DESCRIPTION

In the following description, numerous specific details are given toprovide a thorough understanding of the invention. It will, however, beapparent to one skilled in the art that the invention may be practicedwithout these specific details. Furthermore, some well-known systemconfigurations and process steps are not disclosed in detail, as theseshould be well-known to those skilled in the art.

Likewise, the drawings showing embodiments of the structures orapparatus are not to scale and some dimensions are exaggerated forclarity of presentation. Also, where multiple embodiments are disclosedand described as having some features in common, like or similarfeatures will usually be described with same reference numerals for easeof illustration and description thereof.

FIG. 1 to FIG. 10 are schematic diagrams showing a method for forming alayout pattern on a substrate by sidewall image transfer (SIT)technology according to one embodiment of the present invention. FIG. 11is a simplified flowchart showing a method for forming a layout patternon a substrate according to one embodiment of the present invention.Please refer to FIG. 1 and FIG. 11; in step S110, an original layoutpattern 10 is first provided to a database of a computer system. Theoriginal layout pattern 10, which is an ideal designed pattern supposedto be formed in final products, may include feature patterns used toconstruct integrated circuits (IC) such as device patterns, contact padpatterns, or layout of circuits, but not limited thereto. According tothis embodiment, the original layout pattern 10 is classified into atleast a first feature pattern 12 and a second feature pattern 14. Thefirst feature pattern 12 may consist of straight line patterns 16 andbent line patterns 18 with the same widths, while the second featurepattern 14 may consist of rectangular pad patterns (not shown)connecting to the corresponding straight line patterns 16 or bent linepatterns 18. As depicted in FIG. 1, since the first feature pattern 12is preferably used to construct active regions in semiconductor devicesand the second feature pattern 14 is preferably used to constructinterconnection pads, the dimensions of the straight line patterns 16and the bent line patterns 18 are smaller than those of the padpatterns, but not limited thereto.

After the classification of the original layout pattern 10, step S120and step S130 are carried out sequentially. More precisely, in stepS120, at least a first layout pattern, a second layout pattern, and athird layout pattern are generated and stored in a computer databaseaccording to the original layout pattern. In step S130, the first layoutpattern, the second layout pattern, and the third layout pattern arerespectively defined on a first mask, a second mask, and a third mask.The first mask, a second mask, and a third mask may be used toconstitute a mask set according to the present embodiment. After stepS120 and step S130, the first layout pattern, the second layout pattern,and the third layout pattern may be further respectively transferred tolayers on or over a substrate in the subsequent fabrication process. Itshould be noted that, since the contour of the layout patterns formed inthe layers on or over the substrate usually deviates from what wasintended to be formed, a suitable correction method, such as opticalproximity correction (OPC), is often carried out to correct them. Forexample, the usual way of correcting the layout patterns includes anadjustment of the line width of the line segment, and the disposition ofprintable or non-printable assist patterns, such as serif or hammerheadpatterns at the line end or the corner. Alternatively, some of theassist patterns on the individual masks may be disposed apart fromadjacent feature patterns. In this way, both the line width adjustmentand the use of assist patterns may be successfully used to avoid thedeviation of the transferred patterns, such as rounded right-anglecorners, shortened line-ends, or increased/decreased line widths whenthe layout patterns on the corresponding photomasks are latertransferred onto the layers on the substrate. Through the OPC processand photomask-making process, the corrected layout patterns aregenerated and respectively defined on the corresponding photomasks.

For the sake of clarity, the actual layout of the first layout pattern,the second layout pattern and the third layout pattern, and the processfor transferring the layout patterns from the masks to the layers on thesubstrate are described in detail in the following paragraphs.

Please refer to FIG. 2. FIG. 2 is a schematic diagram showing a firstmask with a first layout pattern. As depicted in FIG. 2, the firstlayout pattern 100 includes mandrel patterns 22 and dummy mandrelpatterns 24. The mandrel patterns 22 may consist of straight linepatterns 26 and L-shaped patterns 28. In contrast, the dummy mandrelpatterns 24 may only consist of straight line patterns (not shown), butnot limited thereto. Preferably, the dimensions of the mandrel patterns22 are the same as those of the dummy mandrel patterns 24. According tothis embodiment, all the dummy mandrel patterns 24 shown in FIG. 2 areprintable and have dimensions the same as those of the mandrel patterns22 according to this embodiment. However, in another case, some of thedummy mandrel patterns may be non-printable so that they would not betransferred to a layer on or over a substrate in the following process.It should be noted that, since the first pattern layout 100 is correctedby the OPC process in advance, the straight line patterns 24 and 26 andL-shaped patterns 28 formed on the first mask 20 would never be perfectstraight line patterns and perfect L-shaped patterns, they may haveslightly widened line ends and slightly inwards and/or outwards cornersinstead.

Then, please refer to FIG. 3 and FIG. 4. FIG. 3 is a schematic diagramshowing a first layout pattern transferred to a layer over a substrateand surrounded by spacers. FIG. 4 is schematic cross-sectional diagramtaken along a line A-A′ in FIG. 4. Referring to FIG. 3 and FIG. 4, instep S140, the first layout pattern 100 formed on the first mask 20 istransferred to the layer over the substrate 30. For example, in a casethat the substrate 30 is covered by layers including a target layer 31,a hard mask layer 32, and a sacrificial layer (not shown), the firstlayout pattern 100 may be transferred from the first mask 20 to thesacrificial layer through a suitable photolithographic process and anetching process so as to form a first patterned layer 33. It should benoted that there may be another layer, such as a pad layer or anotherhard mask layer, disposed on or under the hard mask layer 32, but notlimited thereto.

The above-mentioned substrate 30 may be a semiconductor substrate (suchas a silicon substrate), a silicon containing substrate (such as asilicon carbide substrate), a III-V group-on-silicon (such asGaN-on-silicon) substrate, a graphene-on-silicon substrate, asilicon-on-insulator (SOI) substrate or an epitaxial layer containingsubstrate. The target layer 31 may be a semiconductor layer made ofmaterials the same as or different from that of the underlying substrate30. The hard mask layer 32 are made of a dielectric layer, such assilicon oxide layer or a silicon nitride layer, but not limited thereto.The sacrificial layer may be made of silicon material, III-V groupsemiconductors or other suitable semiconductor materials, and preferablybe made of polysilicon material.

It should be note that the layout of the first patterned layer 33depicted in FIG. 3 is similar to that depicted in FIG. 2 That is to say,a mandrel patterns 22′ consisting of straight line patterns 26′ andL-shaped patterns 28′ and dummy mandrel patterns 24′ are formed in thefirst patterned layer 33. Additionally, since the mandrel patterns 22and the dummy mandrel patterns 24 are corrected in the corresponding OPCprocess, the straight line patterns 24′ and 26′ and the L-shapedpatterns 28′ formed in the first patterned layer 33 would be more closeto perfect straight line patterns and perfect L-shaped patterns that isoriginally stored in the computer database.

After step S140 is completed, step S150 is then carried out. In stepS150, spacers 34 and 34′ are formed on the sidewalls of the firstpatterned layer 33 through deposition and etching process. Through stepS150, loop-shaped patterns (not shown) consisting of loop-shaped featurepatterns 36 and loop-shaped dummy patterns 38 are formed on thesidewalls of the first patterned layer 33. More precisely, theloop-shaped feature patterns 36 and loop-shaped dummy patterns 38 mayrespectively surround the mandrel patterns 22′ and the dummy mandrelpatterns 24′. Furthermore, each of the loop-shaped feature patterns 36and the loop-shaped dummy patterns 38 may be further divided into twoportions, such as major portions 34 a and 34′a and redundancy portions34 b and 34′b. The layout of the major portions 34 a may be used todefine active regions of the corresponding semiconductor devices and theredundancy portions 34 b and 34′b may be removed in the followingetching process.

Still referring to FIG. 3, patterns within the first patterned layer 33may be distributed with suitable spacings in order to meet therequirements of the minimum rule according to correspondingphotolithographic process. Preferably, the spacings S1 among the mandrelpatterns 22′ are smaller than or equal to the minimum design rule.Besides, the critical dimension of the mandrel patterns 22′ and thedummy mandrel patterns 24′ are preferably larger than that of thespacers 34 and 34′. In other words, the widths W1 of the mandrelpatterns 22′ and the dummy mandrel patterns 24′ are preferably widerthan the widths W2 of the spacers 34 and 34′.

After the formation of the spacers 34, all or portions of the firstpatterned layer 33 may be optionally removed through suitable etchingprocesses. Then, please refer to FIG. 5 and FIG. 6. FIG. 5 is aschematic diagram showing a second mask with a second layout pattern.FIG. 6 is a schematic diagram showing a layout pattern on a substrateafter transferring the second layout pattern. In step S160, portions ofthe spacers 34 and 34′ are removed by transferring geometric patterns 42shown in FIG. 5. For example, after the structure shown in FIG. 3 andFIG. 4 is fabricated, a patterned photoresist layer (not shown) may beformed on the spacers 34 through at least a photolithographic process.More precisely, the patterned photoresist layer may have a layoutpattern almost identical to the second layout pattern 200 formed on thesecond mask, but not limited thereto. Besides, the second layout pattern200 may further include printable dummy geometric patterns (not shown)or non-printable dummy geometric patterns (not shown) which areseparately disposed apart from the geometric patterns 42. These dummygeometric patterns may be used to remove portions of the mandrelpatterns 22′ or dummy mandrel patterns 24′, but not limited thereto.Preferably, the positions of the geometric patterns 42 or the dummygeometric patterns may correspond to those of the spacers 34 and 34′. Inone case, the geometric patterns 42 in the patterned photoresist layermay expose the redundancy portion 34 b and 34′b of the spacers 34 and34′. In another case, the edges of the geometric patterns 42 in thepatterned photoresist layer may partially align with the edges of themandrel patterns 22′ and the dummy mandrel patterns 24′. In thesubsequent etching process, mere the redundancy portions 34 b and 34′bof the spacers 34 and 34′ are removed and the structure shown in FIG. 6is therefore obtained.

Please refer to FIG. 7. FIG. 7 is a schematic diagram showing a thirdmask with a third layout pattern. As depicted in FIG. 7, the thirdlayout pattern 300 includes geometric patterns 62 consisting of padpatterns 64 and dummy pad patterns 66. In addition, the shapes of thepad patterns 64 and the dummy pad patterns 66 are rectangles, but notlimited thereto; their shapes may also be squares, circles or ellipses.Preferably, the dimensions of the pad patterns 64 are larger than thoseof the dummy pad patterns 66. More preferably, the dimensions of thedummy pad patterns 66 are larger than those of the mandrel patterns 22,the dummy mandrel patterns 24, and/or dummy geometric patterns.According to this embodiment, all the dummy pad patterns 66 shown inFIG. 7 are printable according to this embodiment. However, in anothercase, some of the dummy pad patterns may be non-printable so that theywould not be transferred to a layer on or over the substrate in thefollowing process. Besides, the dummy pad patterns 66 are preferablydesigned without overlaying any pattern in the previous masks, such asmandrel patterns and dummy mandrel patterns. It should be noted that,since the third pattern layout 300 is also corrected by the OPC process,the pad patterns 64 and the dummy pad patterns 66 formed on the thirdmask 60 cannot be exactly the same as those later formed on thesubstrate and they may have slightly widened line ends and slightlyinwards and/or outwards corners instead.

Please refer to FIG. 8 and FIG. 9. FIG. 8 is schematic diagram showing alayout pattern on a substrate after transferring a third layout pattern.FIG. 9 is schematic cross-sectional diagram taken along a line B-B′ inFIG. 8. As depicted in FIG. 8 and FIG. 9, in step S170, the third layoutpattern 300 formed on the third mask layer 60 is transferred to a layer,such as a photoresist layer, over the substrate 30 so as to form asecond patterned layer 68. Similarly, the layout of the second patternedlayer 68 depicted in FIG. 8 is similar to that depicted in FIG. 7. Thatis to say, the geometric patterns 62′ consisting of pad patterns 64′ anddummy pad patterns 66′ are formed in the second patterned layer 68.Besides, since the pad patterns 64 and dummy pad patterns 66 arecorrected in the corresponding OPC process, the pad patterns 64′ anddummy pad patterns 66′ defined in the second patterned layer 68 would bemore close to perfect pad patterns and dummy patterns originally storedin the computer database. Still referring to FIG. 8 and FIG. 9, when thesecond patterned layer 68 is made of photoresist, the pad patterns 64′may cover portions of the loop-shaped patterns and especially coverportions of the major portion 34 a. According to this embodiment, thedummy pad patterns 66′ may be uniformly distributed around a peripheryof major portion 34 a of the loop-shaped feature patterns and the majorportion 34′a of the loop-shaped dummy patterns. That is to say, thedummy pad patterns 66′ do not cover or overlay any major portion 34 aand 34′a.

It should be noted that patterns within the second patterned layer 68may be distributed with suitable spacings in order to meet therequirements of the minimum rule according to correspondingphotolithographic process. Preferably, the spacings S2 among thegeometric patterns 62′ are at least 5 times greater than the minimumdesign rule. In addition, the second patterned layer 68 preferably has acritical dimension greater than that of the first patterned layer 33 andthe spacers 34 and more preferably larger than 1 micrometer. That is tosay, the widths W3 and W4 of the second patterned layer 68 are widerthan the widths W1 and W2 of the first patterned layer 33 and thespacers 34. Furthermore, the lengths L3 of the pad patterns 64′ may belonger than the lengths L4 of the dummy pad patterns 66′.

Please refer to FIG. 10. Finally, in step S180, at least a suitableetching process, such as an anisotropic etching process, may be carriedout by using the major portions 34 a and 34′a of the spacers 34 and 34′and the second patterned layer 68 as etch mask. In this way, the layoutpattern consisting of the major portions 34 a and 34′a and the secondpatterned layer 68 may be further transferred to the target layer 31′and therefore form a patterned layer 31′ on the substrate 30. Accordingto this embodiment, the layout of the patterned layer 31′ may correspondto a layout of semiconductor devices, such as FinFET devices, but notlimited thereto.

In summary, the embodiments of the present invention provide a methodfor forming a layout pattern. According to these embodiments, the dummypatterns with different dimensions are distributed over differentindividual photomasks and these dummy patterns with different dimensionsmay be transferred to the target layer concurrently. In this way, thefabrication process can be therefore more effective and thecorresponding process window is therefore enhanced.

Those skilled in the art will readily observe that numerousmodifications and alterations of the device and method may be made whileretaining the teachings of the invention. Accordingly, the abovedisclosure should be construed as limited only by the metes and boundsof the appended claims.

What is claimed is:
 1. A mask set for defining a layout pattern of a semiconductor device, comprising: a first mask comprising a first layout pattern, wherein the first layout pattern comprises a plurality of mandrel patterns belonging to the layout pattern and a plurality of dummy mandrel patterns not belonging to the layout pattern; a second mask comprising a second layout pattern, wherein the second layout pattern comprises a plurality of geometric patterns, and the geometric patterns cover portions of the mandrel patterns and portions of the dummy mandrel patterns; and a third mask comprising a third layout pattern, wherein the third layout pattern comprises a plurality of dummy pad patterns not belonging to the layout pattern, and the dummy pad patterns are laterally spaced apart from the mandrel patterns and the dummy mandrel patterns.
 2. The mask set of claim 1, wherein the mandrel patterns and the dummy mandrel patterns have same dimensions.
 3. The mask set of claim 1, wherein at least one of the dummy mandrel patterns is non-printable.
 4. The mask set of claim 1, wherein the second layout pattern further comprises a plurality of dummy geometric patterns, and at least one of the dummy geometric patterns is non-printable.
 5. The mask set of claim 4, wherein dimensions of the dummy pad patterns are greater than dimensions of the dummy mandrel patterns and the dummy geometric patterns.
 6. The mask set of claim 1, wherein dimensions of the dummy pad patterns are larger than dimensions of the mandrel patterns and the dummy mandrel patterns.
 7. The mask set of claim 1, wherein all of the dummy pad patterns are printable.
 8. The mask set of claim 1, wherein the third layout pattern further comprising a plurality of pad patterns belonging to the layout pattern.
 9. The mask set of claim 8, wherein at least one of the pad patterns overlaps at least one of the mandrel patterns. 